Footprint Analysis of CMOS Compatible Silicon-on-Insulator Based Photonic Waveguides

Aim: Establish the efficient footprint size, i.e., the total substrate width of photonic waveguides (Ridge, Rib, and Slot) under the fundamental mode propagation constraints. Objective: By varying the total substrate width for all photonic waveguides (Ridge, Rib, and Slot) with respect to four major waveguide parameters, namely effective refractive index, propagation loss, propagation length, and confinement percentage, the converged values of these waveguide parameters have to be obtained. Methods: The Finite Element Method (FEM) based simulations, using the COMSOL Multiphysics, have been used to study the modal characteristics of photonic waveguides to achieve their efficient footprint size. Results: The total substrate widths have been obtained for all four parameters and considering the impact of all these waveguide parameters simultaneously, the efficient total substrate width has been recognized as 2500 nm, 4000 nm, and 3000 nm, respectively, for Ridge, Rib, and Slot waveguides. Conclusion: The efficient waveguide footprints, i.e., the total substrate widths for the three photonic waveguides, namely Ridge, Rib and Slot waveguides have been established.