Skip to content
2000
Volume 19, Issue 6
  • ISSN: 1872-2121
  • E-ISSN: 2212-4047

Abstract

Diamond, with its unparalleled combination of physical and chemical attributes, occupies a critical role in future technological domains; yet, the caliber of its surface quality is decisively linked to its performance within advanced applications. Thus, engaging in super-precision processing to elevate the surface integrity of diamond constitutes a central tenet for broadening its application potential. This paper systematically dissects patents pertaining to diamond polishing apparatus, not only revealing the distinctive strengths and pragmatic features inherent in contemporary diamond polishing technology but also identifying limitations and avenues for refinement within current polishing methodologies. With the continuous expansion and deepening of modern industrial sectors, there is a growing demand for diversified and specialized material performance. Diamond, as a pivotal raw material, exhibits immense potential in its composite applications with a variety of other materials, forming an entire industrial chain that has permeated numerous industries. Throughout the comprehensive preparation process of diamond, from rough stone to finished product, polishing techniques play a critical role, representing an indispensable step in enhancing the surface quality and functional attributes of diamond products. This study provides a comprehensive review of representative patents in the field of diamond polishing apparatus, analyzing the distinctive functional attributes and performance characteristics of various diamond polishing devices. The study classifies polishing devices according to their design characteristics and application domains into five distinct categories: polishing apparatuses specifically designed for single-crystal diamonds, systems tailored for the polishing of complex curved surface diamonds, laser-assisted diamond polishing setups, structurally-enhanced diamond polishing equipment, and functionally-specialized diamond polishing tools. The analysis underscores the unique innovative aspects and advantages demonstrated by each patent in addressing the inherent limitations of traditional polishing devices. Moreover, it elucidates the technological constraints and developmental gaps that exist within each respective area. Presently, the essence of polishing technology research revolves around the precision and efficacy in polishing single-crystal diamonds and intricate curved diamond surfaces, alongside the structural innovation and functional refinement of polishing apparatuses. Predominant among these devices are those that largely depend on mechanical polishing methods integrated with laser-assisted and chemical mechanical polishing methodologies, where patent advancements are mainly geared towards boosting efficiency, guaranteeing surface integrity, fortifying adaptability across different operating scenarios, and incorporating multiple functionalities. Concurrently, considerable attention is given to enhancing the ecological performance of these systems. There remains a significant underdevelopment and limited widespread application of diamond polishing apparatus in advanced technologies such as thermal chemical polishing and ion beam polishing. This gap presents an enormous potential for innovation breakthroughs and diversified advancements in polishing techniques. There is an urgent need for increased investment to propel the development and integration of automated control systems, intelligent monitoring, and deeper exploration of new materials within polishing technology. The aim is to realize higher-level automated and intelligent diamond polishing solutions that can achieve more efficient, precise, and environmentally friendly polishing objectives.

Loading

Article metrics loading...

/content/journals/eng/10.2174/0118722121307776240606073455
2024-07-12
2025-06-01
Loading full text...

Full text loading...

References

  1. FuJ. LiY. An insight into diamond industry development through the trends in patent applications.Diamond and Abrasive Engineering201838058792
    [Google Scholar]
  2. LiB. The world’s hardest mineral.Polar Sci.2021074041
    [Google Scholar]
  3. SongY. GuoX. JinZ. Research status of diamond chemical mechanical polishing.Surf. Technol.202049041122
    [Google Scholar]
  4. WangG. LiX. Applications of nanodiamonds in modern industry.Superhard Materials Engineering202335065155
    [Google Scholar]
  5. ZhaoJ. HaoX. ZhaoK. Advances in the synthesis of high-thermal-conductivity diamond materials and device applications via microwave plasma chemical vapor deposition.J. Chin. Ceram. Soc.2022500718521864
    [Google Scholar]
  6. PIERSONH. Handbook of carbon, graphite, diamond and fullerenes properties, processing and applications.LondonNoyes Publications199387121
    [Google Scholar]
  7. THOMASR.E. Thermal desorption from hydrogenated and oxygenated diamond (100) surfaces.J. Vac. Sci. Technol. A: Vac. Surf. Films.199210424512457
    [Google Scholar]
  8. TIANY J TIAN Y J. Nanostructured superhard materials.Chin. Sci. Bull.2018631413211331
    [Google Scholar]
  9. MayP.W. Diamond thin films: A 21st-century material.Philosophical Transactions of the Royal17662000358473495
    [Google Scholar]
  10. WangQ. LiL. YuL. Recent advances in the development of superhard material products internationally and domestically.J. Cent. Plain. Instit. Tech.201324014246
    [Google Scholar]
  11. ZhiL. XieZ. FengL. Current applications and prospects of superhard materials in precision machining.Superhard Materials Engineering201830064346
    [Google Scholar]
  12. ShiG. HanD. ZhuK. Comparative analysis of laser cutting and water jet-guided laser cutting of natural diamond.Manufacturing Automation201840025759
    [Google Scholar]
  13. ThummM. Progress on gyrotrons for ITER and future thermonuclear fusion reactors.IEEE Trans. Plasma Sci.201139497197910.1109/TPS.2010.2095042
    [Google Scholar]
  14. BermanL.E. HastingsJ.B. Peter SiddonsD. KoikeM. StojanoffV. HartM. Diamond crystal X-ray optics for high-power-density synchrotron radiation beams.Nucl. Instrum. Methods Phys. Res. A1993329355556310.1016/0168‑9002(93)91291‑T
    [Google Scholar]
  15. MildrenR.P. ButlerJ.E. RabeauJ.R. CVD-diamond external cavity Raman laser at 573 nm.Opt. Express20081623189501895510.1364/OE.16.01895019581986
    [Google Scholar]
  16. HEMLEYR J. Growing diamond crystals by chemical vapor deposition.Elements200511105108
    [Google Scholar]
  17. AwschalomD.D. EpsteinR. HansonR. The diamond age of spintronics.Sci. Am.20072974849110.1038/scientificamerican1007‑8417926759
    [Google Scholar]
  18. NEBELC E. Electrochemical properties of undoped diamond.BerlinWiley200893127
    [Google Scholar]
  19. KoizumiS. WatanabeK. HasegawaM. KandaH. Ultraviolet emission from a diamond pn junction.Science200129255231899190110.1126/science.106025811397942
    [Google Scholar]
  20. HirdJ.R. FieldJ.E. Diamond polishing.Proc.- Royal Soc., Math. Phys. Eng. Sci.200446020523547356810.1098/rspa.2004.1339
    [Google Scholar]
  21. YangN. ZongW. LiZ. SunT. Wear process of single crystal diamond affected by sliding velocity and contact pressure in mechanical polishing.Diamond Related Materials201558465310.1016/j.diamond.2015.06.004
    [Google Scholar]
  22. WeiF. Simulation and Experimental Study on Precision Polishing of Monocrystalline Diamond Substrates.DZhengzhou University of Aeronautics2023
    [Google Scholar]
  23. JiaoK. HuangS. LiZ. A comprehensive review of polishing technology for CVD diamond films.Zhongguo Jixie Gongcheng20112201118126
    [Google Scholar]
  24. ZongW.J. LiD. ChengK. SunT. WangH.X. LiangY.C. The material removal mechanism in mechanical lapping of diamond cutting tools.Int. J. Mach. Tools Manuf.2005457-878378810.1016/j.ijmachtools.2004.11.014
    [Google Scholar]
  25. BUNDYF Man-made diamonds.Nature199517695155
    [Google Scholar]
  26. HaoJinglin DengLifen WangKaiyue Progress in research on high-temperature and high-pressure synthesis of doped diamond.J. Synth. Cryst.2024120
    [Google Scholar]
  27. MaoM. YangZ. Mechanism, process, and characteristic research on high-temperature high-pressure synthesis of diamond.Superhard Materials Engineering202133051524
    [Google Scholar]
  28. YueY. LiS. SuT. Advances in the study of large single crystals of diamond under high temperature and high pressure.Wuli Xuebao202069233045
    [Google Scholar]
  29. JiaX. Research on high-temperature and high-pressure synthesis of diamond-like materials.J. At. Mol. Phys.20203706909915
    [Google Scholar]
  30. EvresoleW.G. Synthesis of diamond.USDiamond and Abrasive Engineering1962
    [Google Scholar]
  31. ZhangW. Research progress on the synthesis of diamond by chemical vapor deposition.J. Chin. Ceram. Soc.20214204537546
    [Google Scholar]
  32. PanH. BoF. YanJ. Current status and research progress on the preparation of single-crystal diamond by CVD method.Chem. Technol. Devel.201948092731
    [Google Scholar]
  33. WuY. Research status on the preparation methods and applications of diamond films.J. Heat Treat. Mater.20194005116
    [Google Scholar]
  34. PiH. XiongJ. WangJ. Mechanical properties of thick CVD diamond films.Journal of Wuhan Institute of Technology200931015153
    [Google Scholar]
  35. GLOORS. UV laser polishing of thick diamond films for IR windows.Appl. Surf. Sci.1999138-1391135139
    [Google Scholar]
  36. MacleanA.J. BirchR.B. RothP.W. KempA.J. BurnsD. Limits on efficiency and power scaling in semiconductor disk lasers with diamond heatspreaders.J. Opt. Soc. Am. B200926122228223610.1364/JOSAB.26.002228
    [Google Scholar]
  37. GuptaB.K. MalsheA. BhushanB. SubramaniamV.V. Friction and wear properties of chemomechanically polished diamond films.J. Tribol.1994116344545310.1115/1.2928862
    [Google Scholar]
  38. XinH. Research on Chemical Mechanical Polishing Technology for Nano-Polycrystalline Diamond Cutting Tools.Yanshan University2023
    [Google Scholar]
  39. HeY. WuC. TangX. Current research status and development trends of chemical mechanical polishing technology.Mater. Res. Appl.20211504432440
    [Google Scholar]
  40. XueH. JinZ. ShiZ. Mechanical grinding and chemical mechanical polishing techniques for monocrystalline diamond.Nanotechnology and Precision Engineering20151302102107
    [Google Scholar]
  41. WeimaJ.A. ZaitsevA.M. JobR. KosacaG. BlumF. GraboschG. FahrnerW.R. KnoppJ. Investigation of non-diamond carbon phases and optical centers in thermochemically polished polycrystalline CVD diamond films.J. Solid State Electrochem.20004842543410.1007/s100089900099
    [Google Scholar]
  42. ZongW. ZhangJ. LiuY. SunT. Achieving ultra-hard surface of mechanically polished diamond crystal by thermo-chemical refinement.Appl. Surf. Sci.201431661762410.1016/j.apsusc.2014.08.057
    [Google Scholar]
  43. HuangS. LiZ. JiaoK. Thermal chemical polishing technology for CVD diamond films.J. Synth. Cryst.2009380614561462
    [Google Scholar]
  44. XuH. ZangJ. TianP. YuanY. WangY. YuY. LuJ. XuX. ZhangP. Surface conversion reaction and high efficient grinding of CVD diamond films by chemically mechanical polishing.Ceram. Int.20184417216412164710.1016/j.ceramint.2018.08.247
    [Google Scholar]
  45. SHIS J. Preparation and polishing mechanism research of polishing plate used for dynamic friction polishing diamond.DalianDalian University of Technology2016
    [Google Scholar]
  46. ZhouL. HuangS.T. XuL.F. An efficient super-high speed polishing method for CVD diamond films.Int. J. Refract. Hard Met.201129669870410.1016/j.ijrmhm.2011.05.005
    [Google Scholar]
  47. XuH. ZangJ. YangG. TianP. WangY. YuY. LuJ. XuX. ZhangP. An efficient titanium-containing corundum wheel for grinding CVD diamond films.Diamond Related Materials20188411912610.1016/j.diamond.2018.03.018
    [Google Scholar]
  48. CuiZ. LiG. ZongW. A polishing method for single crystal diamond (100) plane based on nano silica and nano nickel powder.Diamond Related Materials20199514115310.1016/j.diamond.2019.04.016
    [Google Scholar]
  49. TokarevV.N. WilsonJ.I.B. JubberM.G. JohnP. MilneD.K. Modelling of self-limiting laser ablation of rough surfaces: Application to the polishing of diamond films.Diamond Related Materials19954316917610.1016/0925‑9635(94)00241‑X
    [Google Scholar]
  50. SinghR.K. LeeD-G. Excimer laser-assisted planarization of thick diamond films.J. Electron. Mater.199625113714210.1007/BF02666187
    [Google Scholar]
  51. RothschildM. ArnoneC. EhrlichD.J. Excimer-laser etching of diamond and hard carbon films by direct writing and optical projection.J. Vac. Sci. Technol. B19864131031410.1116/1.583320
    [Google Scholar]
  52. MaY. YaoZ. ChaoW. Femtosecond laser polishing of the surface of CVD diamond coatings.Optical and Precision Engineering2019270116417110.3788/OPE.20192701.0164
    [Google Scholar]
  53. YaoZ. Research on Polishing Technology for CVD Diamond Coatings Based on Femtosecond Lasers.Anhui Jianzhu University2019
    [Google Scholar]
  54. Shu-taoHUANG Ying-xueYAO Hong-zhiZHANG Processing technology of diamond film.New technology & new process19961314
    [Google Scholar]
  55. ZhaoT. GrpgamD.F. BovardB.G. Diamond film polishing with argon and oxygen ion beams.Proceedings of the International Society for Optical, Tucson, AZ, 1990, 48: 479.
    [Google Scholar]
  56. YoshidaA. DeguchiM. KitabatakeM. HiraoT. MatsuoJ. ToyodaN. YamadaI. Atomic level smoothing of CVD diamond films by gas cluster ion beam etching.Nucl. Instrum. Methods Phys. Res. B19961121-424825110.1016/0168‑583X(95)01007‑6
    [Google Scholar]
  57. HIRATAA. Smoothing of chemically vapour deposited diamond films by ion beam irradiation.Thin Solid Films199221214348
    [Google Scholar]
  58. Buchkremer—HermannsH. ECR plasma polishing of CVD diamond films.Diamond Related Materials199655/8845849
    [Google Scholar]
  59. XinP. Research on Plasma Etching Enhanced Polishing of CVD Diamond Films.Wuhan Institute of Technology2015
    [Google Scholar]
  60. WangS. WuW. ZhangJ. Research on the mechanism of plasma arc polishing for CVD diamond films.Mech. Eng. J.2009072527
    [Google Scholar]
  61. WuW. WangS. Experimental study and analysis of plasma arc polishing on diamond film sheets.Electrical Machining & Mould2010013537
    [Google Scholar]
  62. GuoZ. WangC. KuangT. Experimental study on electrochemical polishing of CVD diamond films.Diamond and Abrasive Engineering2000120669
    [Google Scholar]
  63. JunC. Research on Electrospark Polishing of CVD Diamond Films.Guangdong University of Technology2002
    [Google Scholar]
  64. WangC. GuoZ. JunC. Electrospark polishing of diamond films using a rotating electrode.Jixie Gongcheng Xuebao2002S116817110.3901/JME.2002.supp.168
    [Google Scholar]
  65. MalsheA.P. ParkB.S. BrownW.D. NaseemH.A. A review of techniques for polishing and planarizing chemically vapor-deposited (CVD) diamond films and substrates.Diamond Related Materials1999871198121310.1016/S0925‑9635(99)00088‑6
    [Google Scholar]
  66. HansonR. AwschalomD.D. Coherent manipulation of single spins in semiconductors.Nature200845371981043104910.1038/nature0712918563155
    [Google Scholar]
  67. NebelC.E. RezekB. ShinD. UetsukaH. YangN. Diamond for bio-sensor applications.J. Phys. D Appl. Phys.200740206443646610.1088/0022‑3727/40/20/S21
    [Google Scholar]
  68. ALMAVIVAS. Thermal and fast neutron detection in chemical vapor deposition single-crystal diamond detectors.J. Appl. Phys.20081035570575
    [Google Scholar]
  69. WenH. PingX. JingL. Research status and prospect on polishing technology of large size single crystal diamond substrate.Jixie Gongcheng Xuebao2021572215717110.3901/JME.2021.22.157
    [Google Scholar]
  70. WangX. WangD. WangS. A chemical mechanical polishing device for large-sized single crystal diamond wafer.C.N. Patent 108621022A2018
    [Google Scholar]
  71. DiW. ZhengD. RuiZ. MingY. YuanchengX.U. A device for precision polishing of single crystal diamond.C.N. Patent 207997223U2018
    [Google Scholar]
  72. LyuJ. Single crystal diamond nondestructive polishing device.C.N. Patent 212683341U2021
    [Google Scholar]
  73. QiaoJ. ZhuZ. A polishing device for single crystal diamond.C.N. Patent 217552090U2022
    [Google Scholar]
  74. QiaoJ. ZhuZ. Polishing device for single crystal diamond grinding disc.C.N. Patent 217728109U2022
    [Google Scholar]
  75. SheD. SongH. WenY. ZhaoH. KangJ. MengD. JuL. FuZ. A single-crystal diamond polishing device with controllable atmosphere and temperature.C.N. Patent 115625615A2023
    [Google Scholar]
  76. ZheG.U. WuZ. XueH. LiuL. BingZ. KeZ. A single crystal diamond polishing device and method.C.N. Patent 116423364A2023
    [Google Scholar]
  77. WangS. YongtaoM.A. ChenW. ShiT. SunY. A polishing machine suitable for polishing spherical diamond.C.N. Patent 1748938A2006
    [Google Scholar]
  78. XiangB. WangS. ZhouS. SuW. HaoW. A linear polishing equipment specifically designed for polishing diamond thin films on the draw die’s diameter-controlled area.C.N. Patent 207669067U2018
    [Google Scholar]
  79. LiS. PengS. A diamond polishing device.C.N. Patent 114473754A2022
    [Google Scholar]
  80. ZhaoZ. QinX. TaoY. TanZ. ZhouM. A diamond-coating polishing equipment and the corresponding technique.C.N. Patent 116652837A2023
    [Google Scholar]
  81. ZhuZ. A polishing machine for spherical synthetic diamond.C.N. Patent 116619225A2023
    [Google Scholar]
  82. JingL.U. ChenL. XinY. WangJ. LuoQ. KeC. WenQ. A device and its polishing method for femtosecond laser-assisted polishing of diamond.C.N. Patent 115229647A2022
    [Google Scholar]
  83. XuJ. NianL. LingL. XiaoJ. ZhangJ. A device and method for laser-induced graphitization to facilitate diamond polishing.C.N. Patent 116141086A2023
    [Google Scholar]
  84. FangY. JunL. ZhongY. A laser assisted diamond polishing device and its application method.C.N. Patent 116330135A2023
    [Google Scholar]
  85. JiangL. TingX. A laser polishing method and device for cultivating diamond surface.C.N. Patent 116944685A2023
    [Google Scholar]
  86. KimD.C. SeoI.G. Natural diamond universal polishing machine.K.R. Patent 20100060397A2010
    [Google Scholar]
  87. FujimakiK. YokozawaT. Method and device for polishing diamond film.J.P. Patent 2013136110A2013
    [Google Scholar]
  88. MehtaH.R. Motor and diamond polishing machine thereof.W.O. Patent 2017021786A12017
    [Google Scholar]
  89. HuY. A kind of grinding disc for polishing diamond surface with high precision.C.N. Patent 109909872A2019
    [Google Scholar]
  90. LiW. LiX. BinL. A polishing device for diamond.C.N. Patent 209304285U2019
    [Google Scholar]
  91. HardyA. GrotjohnT.A. DrownE.K. BeckerM. Polishing apparatus for smoothing diamonds.W.O. Patent 2022192344A12022
    [Google Scholar]
  92. RenW. Diamond saw blade polishing device.C.N. Patent 218476105U2023
    [Google Scholar]
  93. SunM. Polishing device for diamond.C.N. Patent 219504462U2023
    [Google Scholar]
  94. WenY. SunJ. SheD. BinT. MengD. KangJ. Diamond grinding and polishing processing equipment and processing method.C.N. Patent 111251133A2020
    [Google Scholar]
  95. JileiLv. LinT. DiW. JunG. ZhuD. MaoW. A diamond polishing equipment with cooling function.C.N. Patent 215357832U2021
    [Google Scholar]
  96. WuY. A polishing apparatus for diamond.C.N. Patent 215968131U2022
    [Google Scholar]
  97. ZhengF. CuiM. LiH. FangH. A diamond polishing equipment equipped with a function for quantitative addition of polishing fluid.C.N. Patent 217143514U2022
    [Google Scholar]
  98. GuoH. KeZ. ChenY. An equipment designed for mutual polishing of two thin-film diamond layers.C.N. Patent 217168009U2022
    [Google Scholar]
  99. WangX. LiangW. WuS. ZhaoY. RenF. A polishing device.C.N. Patent 217225032U2022
    [Google Scholar]
  100. JieL. A nanodiamond polishing machine equipped with a diameter measuring feature.C.N. Patent 219027097U2023
    [Google Scholar]
  101. WangN. ZhuJ. ShaoJ. XuY.C. ShiC. A diamond polishing technique and parameter control system incorporating temperature feedback control.C.N. Patent 116728260A2023
    [Google Scholar]
/content/journals/eng/10.2174/0118722121307776240606073455
Loading
/content/journals/eng/10.2174/0118722121307776240606073455
Loading

Data & Media loading...

This is a required field
Please enter a valid email address
Approval was a Success
Invalid data
An Error Occurred
Approval was partially successful, following selected items could not be processed due to error
Please enter a valid_number test